Micro Electronic and Mechanical Systems

The emergence of MEMS is primarily attributed to the establishment of sophisticated IC manufacturing techniques and processes that served as a foundation for realizing many innovative silicon-based micromachining technologies. Advances in this area have brought about a revolution in mechanical engineering, enabling the miniaturization and system-level integration of mechanical structures and devices with ICs on a chip for MEMS fabrication. With miniaturized sensors and actuators, MEMS provide us with the ability to interact with micro-scale environments with non-electrical/-electronic parameters, found in the mechanical, optical, chemical, biological, and other domains. This exceptional ability has led to their application in fields ranging from implantable medical sensors to video game controllers. There is no doubt that continued development of MEMS and microsystems with electromechanical functionalities will extend their contribution to society, in parallel with the evolution of IC technologies.

This book discusses key aspects and the latest research developments in micro electronic andmechanical systems. The book addresses a wide range of fundamental and practical issues related to MEMS, advanced metal-oxide-semiconductor (MOS) and complementary MOS (CMOS) devices, SoC technology, integrated circuit testing and verification, and other important topics in the field.