Book Statistics
Optical Diagnostics for Thin Film Processing
Description
Optical Diagnostics for Thin Film Processing is unique. No other volume explores the real-time application of optical techniques in all modes of thin film processing. The text can be used by students and those new to the topic as an introduction and review of the subject. It also serves as a comprehensive resource for engineers, technicians, researchers, and scientists already working in the field.
Key Features
* The only volume that comprehensively explores in situ, real-time, optical probes for all types of thin film processing
* Useful as an introduction to the subject or as a resource handbook
* Covers a wide range of thin film processes including plasma etching, MBE, MOCVD, and rapid thermal processing
* Examples emphasize applications in microelectronics and optoelectronics
* Introductory chapter serves as a guide to all optical diagnostics and their applications
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Each chapter presents the underlying principles, experimental implementation, and applications for a specific optical diagnostic
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