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Analysis and Design Principles of MEMS Devices
Description
MEMS have been under development for several decades. A variety of MEMS devices have been developed and many of them also mass-produced. However, the analysis and design principles for MEMS devices are still widely scattered in the literature over many different disciplines. This situation is not convenient for the researchers and engineers who are developing MEMS devices or for students who are studying in this interesting area.
This book studies the analysis and design principles of MEMS devices (the micro mechanical sensors and actuators) more systematically than ever before. The theories essential for the analysis and design of MEMS includes the dynamics of micro mechanical structures (the microdynamics) and the sensing schemes of micro sensors, in addition to microelectronics theory.
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